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SEM-XRF: Full Range EDS on large and irregular geological samples

Micro-X-ray fluorescence spectroscopy (XRF) represents a well-established and complementary analytical technique to electron beam energy dispersive spectroscopy (EDS) for the detailed characterization of elemental composition in samples. The integration of the X-ray source (namely XTrace) facilitates the application of XRF technology within a scanning electron microscope (SEM). Micro-XRF excitation analysis is a specialized small-area/volume technique, particularly suitable for beam-sensitive samples due to the absence of charging effects. The technique offers significant advantages, including enhanced sensitivity for trace element detection, the capability to excite higher energy X-ray lines (spanning a full spectral range to 40 keV), and the acquisition of information from greater sample depths even in centimeter level.

The deployment of advanced X-ray polycapillary optics enables the focal spot size of the X-rays to be reduced to 10 microns, all within an X-ray source compatible with SEM ports. X-ray energy detection is performed using the existing EDS detector integrated into the SEM system. Consequently, the SEM system attains dual-source capability, encompassing both electron and X-ray sources (as illustrated in Fig. 1), thereby expanding the possibilities for material characterization. This dual-source capability is termed "Full Range EDS," leveraging the novel analytical potential arising from the combined dual excitation of micro-XRF and electron beam sources alongside an EDS detector. This dual-beam system, allowing samples to interact with either the SEM's electron beam, the XTrace’s X-ray photons, or both simultaneously. Full Range EDS confers numerous advantages over traditional EDS, providing researchers with deeper insights into the elemental and compositional intricacies of their samples.

Details

Author
Yang Yang1, Andrew Menzies1, Stephan Boehm1
Institutionen
1Bruker Nano GmbH, Germany
Veranstaltung
GeoSaxonia 2024
Datum
2024
DOI
10.48380/shsa-1y68